Filters za IGS Surface Mount C-Seal zigezweho kuri sisitemu ya Gazi ya Semiconductor ya Ultra-Pure

Filters za IGS Surface Mount C-Seal zigezweho kuri sisitemu ya Gas Semiconductor Gas nziza cyane. Ishusho yagaragaye

Ibisobanuro bigufi:

Ikirango:HENGKO

Izina ry'ishungura:Akayunguruzo ka C-Seal ka IGS ko gushyira hejuru

Ibikoresho:SS 316L

Igipimo cy'amazi asohoka:10 ~ 120 SLPM

Ubushyuhe ntarengwa bwo gukora:460° C

Ingano yo gukuraho uduce duto:> 0.003 μm

Ohereza imeri kuri twe Garuka ku byiciro bito

Ibisobanuro birambuye ku gicuruzwa

Ibirango by'ibicuruzwa

Ibisobanuro

Filter za HENGKO Surface Mount zagenewe kuzuza ibisabwa cyane bya sisitemu za gaze zikoreshwa mu bikoresho bya OEM bya semiconductor. Zitanga filter nziza ku nganda kuri 0.003 µm, izi filter zitanga imikorere myiza kandi yizewe hamwe n'ubushobozi bwo gufata uduce twa ≥99.9999999% (9-LRV) kuri 120 slpm.

Yakozwe mu ifu ikomeye ya 316L y'icyuma kidashonga yakoreshejwe mu gusya no mu nzu, izi filters zujuje ibisabwa bya SEMI F86-0304, zifite ibice bibiri byagenewe sisitemu yo gukwirakwiza gaze ya 1.125” ifite imiterere ya C-seal. Ishyigikira umuvuduko ntarengwa wo kwinjira wa 3.4 MPa kuri 100°C n'itandukaniro ntarengwa ry'umuvuduko wo gukora wa 0.69 MPa kuri 100°C.

Izi filters zihariye, zijyanye n'ibipimo bya seal zo mu bwoko bwa C na W, zikora isuku yo hasi hamwe no kurekura uduce duto twa

Ifite irangi rya Ra< 1.6 µm inyuma na Ra< 0.13 µm imbere, byagenewe kwihanganira ubushyuhe bwinshi kugeza kuri 460°C. Byakozwe kugira ngo byoroshye guhuza no kuvugurura imiterere ya modular, ibi byunguruzo byoroshya ishyirwaho n'ibungabungwa, bifasha kunoza imikorere ya sisitemu mu gutanga no kugenzura gazi za semiconductor.

Ibiranga Igicuruzwa

▶ Imiterere yose y'icyuma kitagira umugese cya 316L
▶ Igishushanyo mbonera gito, imiterere mito, ubwiza bw'ahantu
▶ Imiterere myiza yo gusimbuza gazi no kuyikuramo
▶ Ubushyuhe bwinshi, umuvuduko mwinshi, kandi birwanya ingese
▶ Inzu y'icyuma gikozwe mu buryo bw'amashanyarazi ya 316L
▶ Gushyiraho no kubungabunga byoroshye kandi neza
▶ Gufunga hakoreshejwe ikoranabuhanga, bitakozwe mu buryo bwa "sudded" ku buryo bw'imiterere

Filters za IGS Surface Mount C Seal zakozwe neza cyane kuri sisitemu zo gutanga gaze za semiconductor

Urupapuro rw'amakuru

Ibipimo bya tekiniki	Indangagaciro
Ibikoresho byo gushungura	Ifu ya Sintered Sintered y'icyuma kitagira umugese ya 316L
Ibikoresho byo mu nzu	Ibyuma bita 316L by'icyuma kitagira umugese
Umuvuduko ntarengwa wo kwinjira	3.4 MPa kuri 100°C
Itandukaniro ntarengwa ry'imikorere	0.69 MPa kuri 100°C
Igipimo cyo Kurekura kw'Igenzura rya Heliyumu	1x10⁻¹¹ cc/umunota
Igipimo cyo gusohora amazi mu gipimo cya Heliyumu	1x10⁻⁹ cc/umunota
Ubuvuzi bw'ubuso	Ubuso bwo hanze bwa Ra< 1.6 μm
	Ubuso bw'imbere bwa Ra< 0.13 μm
Ubushyuhe ntarengwa bwo gukora	460°C
Uburyo bwo gufata uduce duto tw'ibice	≥99.9999999% (9-LRV) @ 120 slpm (MPPS y'inyongera, uduce twose)
Isuku yo mu gace k'uburasirazuba	Irekurwa ry'uduce duto:< 0.03 uduce/litiro (< Agace 1/ft³)
	Ihindagurika:Ubushuhe buri munsi ya 10 ppb
Ingano y'uduce duto	≥0.003 μm
Urugendo rw'amazi	0 ~ 120 slpm