Gutunganya ibikoresho bya semiconductors bisukuye cyane
Ibisobanuro
Akayunguruzo ka Gazi Gatembera mu Muvuduko Ukomeye – Kagenewe by’umwihariko kuyungurura gaze mu buryo bwo kuyungurura mu nganda za semiconductor. Kakozwe neza cyane mu byuma bita 316L, gafite imiterere ya disiki ifite inkingi nyinshi cyangwa icucitse kugira ngo gashobore kugabanya imbaraga ku muvuduko mwinshi w’amazi, aho kuyungurura neza bigera kuri 0.003μm kugira ngo gahuze n’ibisabwa kuyungurura mu buryo bwo kuyungurura mu kirere. Kubaka gakozwe mu byuma byose bituma kaba igisubizo cyiza cyo kuyungurura mu bidukikije bishyuha cyane.
Ibiranga Igicuruzwa
▶Imiterere yose ya 316L y'icyuma kitagira umugese— Ituma iramba kandi irwanya ingese.
▶Umuvuduko mwinshi w'amazi, Ubudahangarwa buke— Yakozwe neza kugira ngo itemba cyane kandi igabanuke cyane.
▶Uburyo bwo Kubika Ibice Binini Cyane— Ni byiza cyane mu kubungabunga imiterere myiza cyane.
▶Irwanya ubushyuhe bwinshi, umuvuduko w'amazi, na ingese— Bikwiriye ahantu habi.
▶Ihuye n'imyuka itandukanye ikoreshwa mu gutunganya— Ikoreshwa mu buryo butandukanye mu nganda.
▶Ni byiza cyane mu gukora isuku, gupima no gupakira mu byumba by'isuku— Ni byiza cyane gukoreshwa ahantu hagenzurwa.
▶Isuzuma ry'ubunyangamugayo 100%— Buri firiti ikorerwa isuzuma ryimbitse ry’ubuziranenge kugira ngo harebwe ubuziranenge.
▶Ikizamini cyo gusohora amazi ya Heliyumu 100%— Byemejwe binyuze mu isuzuma rya helium kugira ngo byemezwe ko ari ingenzi mu bikorwa by'ingenzi.
Urupapuro rw'amakuru
Ibipimo bya tekiniki
| Igipimo | Ibisobanuro |
|---|---|
| Ibikoresho byo gushungura | Ifu y'icyuma kitagira umugese ya 316L |
| Ibikoresho byo mu nzu | Icyuma kitagira umwanda cya 316L |
| Umuvuduko munini w'ubwinjiriro | Akabari ka 207 |
| Umuvuduko munini w'impinduka mu mikorere | Akabari ka 5.2 |
| Igipimo cyo Kwemeza Heliyumu | 2 x 10⁻¹⁰ cc/umunota |
| Igipimo cyo gupima Heliyumu | 1 x 10⁻¹⁰ cc/umunota |
| Ubuvuzi bw'ubuso | |
| Ubuso bwo hanze | Ra < 1.6 μm |
| Ubuso bw'imbere | Ra < 0.2 μm |
| Ubushyuhe ntarengwa bwo gukora | |
| Gazi idakora | 400-500℃ |
| Gazi yangiza kandi ikora ingaruka mbi | 50℃ |
| Uburyo bwo Kubika Ibice Bitandukanye mu Buryo | ≥99.9999999% (9LRV) @ 30 slpm |
| Isuku yo mu gace k'uburasirazuba | ≤0.03 uduce/litiro @ > 0.01 μm, 30 slpm |
| Ingano yo kubika uduce duto | ≥0.003 μm |
Ingano
Dore inomero y'igice ushobora gutumiza n'ingano yacyo:
| Icyitegererezo cy'ibicuruzwa | Ibikoresho byo gushungura | Ubuziranenge bwo kuyungurura (μm) | Ubwoko bwo guhuza |
|---|---|---|---|
| Z01B-00647 | Ibyuma bita 316L by'icyuma kitagira umugese | 10 ~ 0.003 | 1/4” |
| Z01B-00648 | Ibyuma bita 316L by'icyuma kitagira umugese | 10 ~ 0.003 | 1/2” |
| Z01B-00649 | Ibyuma bita 316L by'icyuma kitagira umugese | 10 ~ 0.003 | 1/8” |
| Z01B-00650 | Ibyuma bita 316L by'icyuma kitagira umugese | 10 ~ 0.003 | 1” |
| Bishobora guhindurwa | Ibyuma bita 316L by'icyuma kitagira umugese | 10 ~ 0.003 | Uko bikenewe |
Porogaramu zisanzwe
zimwe na zimwe zisanzwe zikoreshwaImashini ziyungurura ibikoresho byinshi n'ibikoresho by'ingenzinaImashini zitunganya imiyoboro ya gaze ku gice cy'imashini zikoresha gaze:
1.Gukora ibikoresho bya semiconductor
*Itanga gaze nziza cyane mu gukora, gukata no gushyira umwuka mu buryo bwa CVD.
*Ibungabunga ubuziranenge bwinshi mu buryo bwo gukwirakwiza imyuka myinshi kuri azote, argon, n'indi myuka itwara ibintu.
2. Umusaruro w'imiti
*Itanga umwuka udafite ubusembwa kandi udafite uduce duto mu nganda zikora ibintu by'ingenzi.
*Ishyigikira uburyo bwo kuyungurura ibintu mu buryo busukuye cyane mu byumba by'isuku n'ahantu hagenzurwa kugira ngo ibicuruzwa bikomeze kuba byiza.
3. Sisitemu ya Gazi yo muri Laboratwari
*Ikoreshwa mu buryo bwa laboratwari mu gusukura imiyoboro ya gazi mu bikoresho byo gusesengura nka chromatography ya gazi na spectrometry y'ubunini.
*Igenzura imyuka isukuye cyane mu bushakashatsi no mu gupima, ikarinda ibikoresho by’ikoranabuhanga.
4. Gutunganya ibiribwa n'ibinyobwa
*Iyungurura CO₂ n'indi myuka ikoreshwa mu gukaranga, gupakira no kubika, ibungabunga umutekano n'ubuziranenge bw'ibiribwa.
*Igenzura ko gaze idafite umwanda iboneka mu nganda zitunganya, cyane cyane ku bigo bitanga gaze nyinshi.
5. Inganda za peteroli na gaze
*Isukura imiyoboro ya gazi karemano mu kuyungurura gazi, ikavanaho imyanda mbere yo kuyibika cyangwa kuyitwara.
*Irinda ibikoresho biri munsi y'amazi ikuraho uduce duto, ubushuhe, n'imyanda mu buryo bw'umwuka utemba cyane.
6. Inganda zikora imiti
*Iyungurura imyuka y'ingirakamaro nka azote na argon ikoreshwa mu guhuza no gukora imiti.
*Ibungabunga isuku ya gazi kugira ngo hirindwe kwandura no kutumvikana kw'ibiyitera.
7. Ubushobozi bwo mu kirere no kwirwanaho
*Itanga imyuka isukuye cyane mu nganda no mu bipimo by'ibikoresho n'ibice by'indege.
*Igenzura isuku ya gazi mu bidukikije bigenzurwa kugira ngo indege n'ibikoresho by'ingabo biteranyirizwe.
8. Gutanga ingufu (Inganda zitanga ingufu)
*Iyungurura imyuka ifite umuvuduko mwinshi kugira ngo ikonjeshe kandi ikoreshwe mu buryo bunoze, cyane cyane mu bihe by'ubushyuhe bwinshi.
*Yongera imikorere myiza no kugabanya ubusaza bw'ibikoresho binyuze mu gukumira ubwandu mu buryo bwo gukonjesha no gutemba kw'imyuka.
Ibi fIbikoresho ni ingenzi mu ikoreshwa ryose risaba ko umwuka utembera neza kandi uhoraho, kongera uburinzi bw'ibikoresho,
imikorere myiza, n'ubwiza bw'umusaruro mu nganda zose.
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