Filters za IGS Surface Mount C Seal zakozwe neza cyane kuri sisitemu zo gutanga gaze za semiconductor
Ibisobanuro
Filter za HENGKO Surface Mount zagenewe kuzuza ibisabwa cyane bya sisitemu za gaze zikoreshwa mu bikoresho bya OEM bya semiconductor. Zitanga filter nziza ku nganda kuri 0.003 µm, izi filter zitanga imikorere myiza kandi yizewe hamwe n'ubushobozi bwo gufata uduce twa ≥99.9999999% (9-LRV) kuri 120 slpm.
Yakozwe mu ifu ikomeye ya 316L y'icyuma kidashonga yakoreshejwe mu gusya no mu nzu, izi filters zujuje ibisabwa bya SEMI F86-0304, zifite ibice bibiri byagenewe sisitemu yo gukwirakwiza gaze ya 1.125” ifite imiterere ya C-seal. Ishyigikira umuvuduko ntarengwa wo kwinjira wa 3.4 MPa kuri 100°C n'itandukaniro ntarengwa ry'umuvuduko wo gukora wa 0.69 MPa kuri 100°C.
Izi filters zihariye, zijyanye n'ibipimo bya seal zo mu bwoko bwa C na W, zikora isuku yo hasi hamwe no kurekura uduce duto twa
Ifite irangi rya Ra< 1.6 µm inyuma na Ra< 0.13 µm imbere, byagenewe kwihanganira ubushyuhe bwinshi kugeza kuri 460°C. Byakozwe kugira ngo byoroshye guhuza no kuvugurura imiterere ya modular, ibi byunguruzo byoroshya ishyirwaho n'ibungabungwa, bifasha kunoza imikorere ya sisitemu mu gutanga no kugenzura gazi za semiconductor.
Ibiranga Igicuruzwa
▶ Imiterere yose y'icyuma kitagira umugese cya 316L
▶ Igishushanyo mbonera gito, imiterere mito, ubwiza bw'ahantu
▶ Imiterere myiza yo gusimbuza gazi no kuyikuramo
▶ Ubushyuhe bwinshi, umuvuduko mwinshi, kandi birwanya ingese
▶ Inzu y'icyuma gikozwe mu buryo bw'amashanyarazi ya 316L
▶ Gushyiraho no kubungabunga byoroshye kandi neza
▶ Gufunga hakoreshejwe ikoranabuhanga, bitakozwe mu buryo bwa "sudded" ku buryo bw'imiterere
Urupapuro rw'amakuru
| Ibipimo bya tekiniki | Indangagaciro |
|---|---|
| Ibikoresho byo gushungura | Ifu ya Sintered Sintered y'icyuma kitagira umugese ya 316L |
| Ibikoresho byo mu nzu | Ibyuma bita 316L by'icyuma kitagira umugese |
| Umuvuduko ntarengwa wo kwinjira | 3.4 MPa kuri 100°C |
| Itandukaniro ntarengwa ry'imikorere | 0.69 MPa kuri 100°C |
| Igipimo cyo Kurekura kw'Igenzura rya Heliyumu | 1x10⁻¹¹ cc/umunota |
| Igipimo cyo gusohora amazi mu gipimo cya Heliyumu | 1x10⁻⁹ cc/umunota |
| Ubuvuzi bw'ubuso | Ubuso bwo hanze bwa Ra< 1.6 μm |
| Ubuso bw'imbere bwa Ra< 0.13 μm | |
| Ubushyuhe ntarengwa bwo gukora | 460°C |
| Uburyo bwo gufata uduce duto tw'ibice | ≥99.9999999% (9-LRV) @ 120 slpm (MPPS y'inyongera, uduce twose) |
| Isuku yo mu gace k'uburasirazuba | Irekurwa ry'uduce duto:< 0.03 uduce/litiro (< Agace 1/ft³) |
| Ihindagurika:Ubushuhe buri munsi ya 10 ppb | |
| Ingano y'uduce duto | ≥0.003 μm |
| Urugendo rw'amazi | 0 ~ 120 slpm |
Ingano
Dore inomero y'igice ushobora gutumiza n'ingano yacyo:
| Icyitegererezo cy'ibicuruzwa | Igipimo cy'amazi anyuramo | Uburebure H (mm) | Uburyo bwo kuyungurura neza | Urwego rw'isuku |
|---|---|---|---|---|
| Z01B-00637 | 10 slpm | 51.6 | 0.003 μm | C |
| Z01B-00638 | 40 slpm | 82.9 | 0.003 μm | C |
| Z01B-00687 | 80 slpm | 126.2 | 0.003 μm | C |
| Z01B-00688 | 120 slpm | 167.9 | 0.003 μm | C |
Porogaramu zisanzwe
Ikoreshwa hamwe na W-seal na C-seal, sisitemu zo gutanga gaze za modular mount 1.125” na 1.5” zo gushyira ku buso.
Ohereza ubutumwa bwawe kuri twe:
